Date:
8:30am-4:30pm, Tuesday, May 24, 2016, Sheraton Albuquerque Airport Hotel, Albuquerque, NM
Course Objectives
- Become familiar with the principles of this major materials analysis analytical technique
- Learn the capabilities of current instrumentation and the principal applications
Course Description
The course begins with a discussion of the components of a FIB system including the liquid metal ion source. The interaction of ions with matter (sputtering process and sputtering yield) is presented and the ion beam assisted chemical vapor deposition (CVD) process and the gas source method used to improve etch rate are explained. Current FIB instrumentation is summarized, including FIB-SEM combination instruments.
The ability to sputter and deposit at less than 10 nm resolution makes possible a wide range of FIB applications. Applications discussed include: imaging (including grain size measurements), micro-machining, integrated circuit modification, and preparation for analysis by other techniques such as Scanning Electron Microscopy (SEM), Transmission Electron microscopy (TEM), Auger Electron Spectroscopy (AES) and Energy Dispersive X-Ray Fluorescence (EDS). Failure analysis aspects of this exceptional site specific technique will be presented.
Who Should Attend?
Scientists, engineers, technicians, and others who desire a practical, current understanding of FIB
Instructor: Fred Stevie, North Carolina State University
Fred Stevie is a Senior Researcher at the Analytical Instrumentation Facility in North Carolina State University and is responsible for SIMS and XPS analyses. His experience with materials characterization using ion beams and mass spectrometry spans more than 25 years, principally with Bell Laboratories at Murray Hill, New Jersey, Allentown, Pennsylvania, and Orlando, Florida. He has authored or co-authored more than 150 publications, including a book on SIMS. His contributions to the SIMS field cover a range of topics including quantification, surface roughening effects, interfacial contaminants, and insulator analysis. FIB interests include sample preparation for TEM, particularly using the lift-out method, and FIB-SIMS. He has also a research professor of Materials Science at the University of Central Florida. He is active in technical organizations, particularly the American Vacuum Society and the SIMS Workshop Series. He received a M.S. degree in physics from Vanderbilt University in 1970.
Course Materials
Course Notes